Microelectronic Test Structures
نویسنده
چکیده
This paper reviews present day test structures and illustrates how they hav e ev olved to a continuously changing technology. Structures for measuring resistivity, contact resistance, feature dimensions and overlay errors are presented. Test structures for helping to predict yield and Wafer Reliability Measurements (WLR) are also discussed.
منابع مشابه
Characterization of Micro-Crack Propagation through Analysis of Edge Effect in Acoustic Micro Imaging of Microelectronic Packages
The miniaturization and three dimensional die stacking in advanced microelectronic packages poses a big challenge to their non-destructive evaluation by acoustic micro imaging. In particular, their complicated structures and multiple interfaces make the interpretation of acoustic data even more difficult. A common phenomenon observed in acoustic micro imaging of microelectronic packages is the ...
متن کاملNeed For Undergraduate And Graduate-Level Education In Testing Of Microelectronic Circuits And Systems
As deep-sub-micron and beyond technology emerges, quality assurance of microelectronic circuits and systems becomes more important than ever. Consequentially, (1) a strong need for well-educated microelectronic circuits and systems test engineers is desired by the industry, (2) graduate-level research efforts are also called to overcome numerous microelectronic circuits and systems test issues....
متن کاملThermal Cycling Life Prediction of Sn-3.0Ag-0.5Cu Solder Joint Using Type-I Censored Data
Because solder joint interconnections are the weaknesses of microelectronic packaging, their reliability has great influence on the reliability of the entire packaging structure. Based on an accelerated life test the reliability assessment and life prediction of lead-free solder joints using Weibull distribution are investigated. The type-I interval censored lifetime data were collected from a ...
متن کاملMicroelectronic circuit test engineering laboratories with programmable logic
A use for programmable logic is presented targeting microelectronic circuit test engineering education. These devices offer strengths in cost, time and flexibility in an educational environment. The rationale for this work is to support electronic hardware design, fabrication and test for mixed-signal integrated circuits typically used in mixed-technology systems.
متن کاملRapid quantification of DNase I activity in one-microliter serum samples.
of performance with new vs used chips. This lowers the cost per SNP to almost one-third of the cost of using a new microelectronic chip and more lowers the cost compared with RFLP analysis by more than one-half. This is approximately the same cost reported by others for detecting eight SNPs on one test site simultaneously (€1.62 per SNP) (6 ). It should be noted, however, that purchase of the N...
متن کامل